Selective etching and formation of xenon difluoride

C - Chemistry – Metallurgy – 23 – F

Patent

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C23F 1/02 (2006.01) C01B 23/00 (2006.01) C09K 13/00 (2006.01) C23F 1/12 (2006.01) C01B 9/08 (2006.01)

Patent

CA 2690697

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