Self-aligned ccd element including two levels of electrodes...

Details Self-aligned ccd element including two levels of electrodes... Self-aligned ccd element including two levels of electrodes...

G - Physics

11

C

356/197

G11C 11/08 (2006.01) H01L 21/00 (2006.01) H01L 21/8234 (2006.01) H01L 29/10 (2006.01) H01L 29/423 (2006.01) H01L 29/76 (2006.01) H01L 29/768 (2006.01)

Patent

CA 1101549

ABSTRACT OF THE DISCLOSURE A self-aligned charge coupled device comprises a semiconductor substrate having implanted barrier regions, an insulation layer disposed over the substrate, a first layer of closely spaced electrodes, a second layer of closely spaced electrodes interlaced between electrodes of the first layer and separated by insulation, and a conductor deposited between the first and second electrodes so as to electrically connect portions of the first electrodes to portions of the second electrodes. The process for fabricating this self-aligned CCD structure is-described.

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