Self aligned schottky guard ring

Details Self aligned schottky guard ring Self aligned schottky guard ring

H - Electricity

01

L

356/154

H01L 21/28 (2006.01) H01L 21/033 (2006.01) H01L 21/338 (2006.01) H01L 29/872 (2006.01)

Patent

CA 1123121

Abstract Self Aligned Schottky Guard Ring A method of forming a self aligned guard ring surrounding a schottky barrier diode device without requiring an enlargement of the final schottky barrier device. The method involves creating an overhanging opening in a insulator layer overlying a semicon- ductor body to expose the schottky contact area on the surface of the semiconductor body, depositing a diffusion barrier material such as molybdenum in the opening, the deposit being of the same size as the smallest part of the overhanging opening so that a guard ring can be formed from a vapor by diffusion around the deposited barrier material.

337524

Affiliated with

Also associated with

Rating

Self aligned schottky guard ring does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Self aligned schottky guard ring, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Self aligned schottky guard ring will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1006784