Self-aligned v-grooves and waveguides

Details Self-aligned v-grooves and waveguides Self-aligned v-grooves and waveguides

G - Physics

02

B

G02B 6/12 (2006.01) G02B 6/136 (2006.01) G02B 6/42 (2006.01)

Patent

CA 2093628

A method of forming a pair of V-grooves in alignment with an array of planar waveguides comprises the steps of simultaneously forming cores (5) for the waveguides and windows (6) for the V- grooves (8), covering the cores with a protective layer (7), and form- ing the V-grooves through the windows. The method is such that the V-grooves (8) are formed on each side of the array of waveguides.

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