Self-supporting zinc alloy rotating sputter target

C - Chemistry – Metallurgy – 23 – C

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C23C 14/35 (2006.01) C22C 18/00 (2006.01) C23C 14/34 (2006.01)

Patent

CA 2103241

Alloys useful for preparing self-supporting cylindrical targets are provided. The alloys comprise zinc and other metals consisting of one or more of the following: aluminum, bismuth, cerium, gadolinium, hafnium, niobium, silicon, tantalum, titanium, vanadium, yttrium, and zirconium. In one preferred embodiment, a zinc alloy with approximately 2o aluminum forms self-supporting cylindrical target from which metal oxide films are prepared by reactive sputtering. The alloy oxide films are clear, transparent, non-absorbing, and optically functional.

L'invention concerne des alliages utiles pour préparer des cibles cylindriques autoportantes. Les alliages comprennent du zinc et d'autres métaux tels que l'aluminium, le bismuth, le cérium, le gadolinium, l'hafnium, le niobium, le silicium, le tantal, le titane, le vanadium, l'yttrium et le zirconium. Dans un mode préféré de réalisation, un alliage de zinc ayant approximativement 2 % d'aluminium forme des cibles cylindriques autoportantes à partir desquelles des films en oxyde métallique sont préparés par pulvérisation réactive. Les films d'oxyde métallique sont clairs, transparents, non absorbants et optiquement fonctionnels.

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