G - Physics – 01 – P
Patent
G - Physics
01
P
G01P 15/18 (2006.01) H01L 21/77 (2006.01) H01L 27/20 (2006.01)
Patent
CA 2471809
A semiconductor acceleration sensor comprises: a frame 2 having an opening 21 inside thereof; flexible beams 3 extending from the frame 2 to the inside of the opening of the frame 2; a weight 5 suspended from and supported by the beams 3 so that the weight 5 can freely move; piezoresistors 4 to be mounted on the beams 3 and to vary the resistance values in response to accelerations which work on the piezoresistors 4. The frame 2 comprises damper plate portions 6, each of which covers a part of the opening 21 spanning from a corner portion 22 of two neighboring sides of the frame 2 on the side of the opening 21 to the inside of the opening 21, and each of which serves serve as a stopper to limit movement of the weight 5. The weight 5 has corner portions 53 which face the corner portions 22, respectively, and each of which is chamfered to have a shape of arc or a polygonal line consisting of at least three sides as seen in plan view. Thereby, the breaking strength of each stopper is increased, and hence a semiconductor acceleration sensor having superior shock resistance can be obtained.
Akai Sumio
Goto Koji
Kataoka Kazushi
Miyajima Hisakazu
Morii Makoto
G. Ronald Bell & Associates
Matsushita Electric Works Ltd.
Panasonic Electric Works Co. Ltd.
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