Semiconductor compound oxide gas sensor of perovskite structure

G - Physics – 01 – N

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117/111, 117/53,

G01N 27/30 (2006.01) G01N 27/12 (2006.01)

Patent

CA 1199064

- 1 - Abstract: A gas sensor includes a layer of a sensitive material formed with spaced electrodes on an electrically insulating substrate, the electrodes being electrically connected to the layer. The layer is formed of a porous film consisting of a uniform mixture of a p-type compound oxide semi- conductor with a perovskite type of crystal structure as the major ingredient and one or more of vanadium, niobium, tantalum and/or compounds thereof as minor ingredients. The minor ingredients are contained in the layer in an amount of 0.01 to 5% by weight, based on the weight of the p-type compound oxide semiconductor, and are incorporated into the layer by diffusing them into the layer. The gas sensor exhibits a small change with time and a reduced tailing effect attendant on variations in the gas combustion. As a result, it is possible to effect measurement, detection and control with a high degree of reliability.

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