Semiconductor defect monitor for diagnosing...

Details Semiconductor defect monitor for diagnosing... Semiconductor defect monitor for diagnosing...

G - Physics

01

R

356/117

G01R 31/28 (2006.01) G01R 31/00 (2006.01) G01R 31/02 (2006.01) G11C 7/00 (2006.01) G11C 29/24 (2006.01)

Patent

CA 1264868

ABSTRACT OF THE DISCLOSURE A semiconductor-processing defect monitor construction for diagnosing processing-induced defects. The semiconductor-processing defect monitor utilizes an array layout and includes continuity defect monitoring structures and short-circuit defect monitoring structures. Once a defect has been indicated by a testing operation, the array layout associated with the defect monitor can be used quickly to determine the approximate location of the known defect, thereby facilitating prompt visual observation of the known defect and, thus, prompt determination of the appropriate corrective action to be applied before substantial continued manufacturing has occurred.

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