G - Physics – 03 – F
Patent
G - Physics
03
F
G03F 7/32 (2006.01)
Patent
CA 2438730
Provided herein are developer solutions useful in producing semiconductor- based circuit elements or precursors thereof, which contain tris-(2- hydroxyethyl) methylammonium hydroxide. Developers according to the invention are either aqueous or alcoholic solutions of tris-(2- hydroxyethyl)methylammonium hydroxide which preferably further comprise a stabilizer. Through use of the compositions provided herein, greatly reduced levels of volatile amines are released during the developing process which lessens the burden on clean room atmosphere purification equipment owing to lessened airborne impurities.
L'invention concerne des solutions révélatrices utiles dans la production d'éléments de circuit contenant des semi-conducteurs, ou de précurseurs desdits éléments, contenant du tri-(2-hydroxyéthyl) méthylammonium hydroxyde. Des révélateurs conformes à l'invention se présentent soit sous forme aqueuse, soit sous forme de solutions alcooliques de tri-(2-hydroxyéthyl) méthylammonium hydroxyde, et contiennent de préférence un agent stabilisateur. L'utilisation de ces compositions permet de réduire de manière considérable les niveaux d'amines volatiles qui sont libérées pendant le processus de développement, ce qui réduit la tâche de l'équipement de purification de l'atmosphère de salle blanche, en raison du taux d'impuretés atmosphériques réduit.
Crawford Wheeler C.
Sjoberg Stephen L.
Su Wei-Yang
Huntsman Petrochemical Corporation
Smart & Biggar
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