H - Electricity – 01 – L
Patent
H - Electricity
01
L
356/162
H01L 29/72 (2006.01) H01L 23/485 (2006.01) H01L 23/522 (2006.01)
Patent
CA 1205577
- 1 - Abstract: A semiconductor device has an insulating film provided in regions other than a mesa region of a substrate having the mesa region. A polycrystalline silicon layer and a metal silicide layer are formed over the insulating film, and a take-out portion for at least one of the emitter, base, and collector members of a bipolar transistor provided in the mesa region is constituted by a film of this multi-layer structure. The result is a device having a higher switching speed than prior devices, due to a reduction in resistivity.
433567
Miyazaki Takao
Nagata Minoru
Nakamura Tohru
Nakazato Kazuo
Ogirima Masahiko
Hitachi Ltd.
Kirby Eades Gale Baker
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