Semiconductor device and process for producing the same

Details Semiconductor device and process for producing the same Semiconductor device and process for producing the same

H - Electricity

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356/159

H01L 21/28 (2006.01) H01L 21/285 (2006.01) H01L 29/40 (2006.01) H01L 29/45 (2006.01)

Patent

CA 1224886

SEMICONDUCTOR DEVICE AND PROCESS FOR PRODUCING THE SAME Abstract of the Disclosure: A semiconductor device having an ohmic electrode which has formed on the surface of a p-type III-V compound semiconductor an assembly of a first Ti layer, a second Zn layer, a third metal layer made of one element selected from among Pt, Mo, W and Cr, and a fourth Au layer is disclosed. A process for producing such semiconductor device is also disclosed. The present invention provides a novel ohmic elec- trode having a low contact resistance comparable to that of a conventional electrode formed by deposition of successive Au, Zn and Au layers. The novel electrode also has the advantage of another conventional electrode wherein the Au electromigration is held to a minimum by forming an assembly of a Ti layer, a metal layer made of an element selected from among Pt, Mo, W and Cr, and an Au layer.

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