Semiconductor device comprising a number of series-arranged...

Details Semiconductor device comprising a number of series-arranged... Semiconductor device comprising a number of series-arranged...

H - Electricity

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H01L 21/28 (2006.01) H01L 21/764 (2006.01) H01L 21/768 (2006.01) H01L 27/08 (2006.01)

Patent

CA 1165009

PHF.79.582 ABSTRACT: A semiconductor device having a number of series arranged Schottky diodes or p-n diodes on one semiconduc- tor plate. The diodes are provided on a semiconductor layer of a conductivity type which is present on a more highly doped layer of the same type, which is situated on a substrate which preferably consists of an insulating or semi-insulating material. The diodes are separated by grooves extending into the substrate and are arranged in series via a metal strip bridging the groove and a conduc- tive column extending into the highly doped layer and pre- ferably consisting of a metal. The invention also relates to a method in which the metal bridge and the column are etchant-resistant via a minimum number of masking steps.

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