G - Physics – 01 – R
Patent
G - Physics
01
R
G01R 31/303 (2006.01) G06F 17/40 (2006.01)
Patent
CA 2380707
A semiconductor device evaluation program product stored in a storage medium for evaluating an electromagnetic field from a semiconductor device, using a semiconductor device evaluation apparatus includes an electromagnetic field sensor, for measuring a two- dimensional electromagnetic field distribution in a plane parallel to the upper surface of the semiconductor device; a computer to which an output of the electromagnetic field sensor is supplied as an input; and a display for displaying data supplied from the computer as an output. The program causes a semiconductor device evaluation apparatus to extract an electromagnetic field distribution higher than a threshold value determined in advance from an electromagnetic field distribution of a semiconductor device measured by the electromagnetic field sensor; convert the electromagnetic field distribution to a distribution image in the two-dimensional plane; collate the distribution image with a projected image of interconnects and lead frames of the semiconductor device which have been generated; and specify the interconnect or the lead frame which is superposed on each other as an emission source if the images of the electromagnetic field distribution, and the interconnects and lead frames are superposed on one another by the collation.
Masuda Norio
Tamaki Naoya
Corporation Nec
G. Ronald Bell & Associates
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