Semiconductor device having a body of amorphous silicon

Details Semiconductor device having a body of amorphous silicon Semiconductor device having a body of amorphous silicon

C - Chemistry, Metallurgy

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C01B 33/02 (2006.01) B05D 5/12 (2006.01) C01B 33/027 (2006.01) C23C 16/22 (2006.01) C23C 16/24 (2006.01) H01L 21/205 (2006.01) H01L 29/04 (2006.01) H01L 31/18 (2006.01) H01L 31/20 (2006.01)

Patent

CA 1187622

AMORPHOUS SEMICONDUCTOR METHOD AND DEVICES Abstract of the Disclosure Preparation of amorphous semiconductor material that is suitable for use in a wide variety of devices by the pyrolytic decomposition of one or more gaseous phase polysemiconductanes, including polysilanes and polygermanes.

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