Semiconductor device having a semiconductor-on-insulator...

H - Electricity – 01 – L

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H01L 29/15 (2006.01) H01L 21/84 (2006.01) H01L 29/786 (2006.01) H01L 27/12 (2006.01) H01L 29/10 (2006.01)

Patent

CA 2650489

A semiconductor device may include an SOI substrate, an insulating layer adjacent the substrate, and a semiconductor layer adjacent a face of the insulating layer opposite the substrate. The device may further include source and drain regions on the semiconductor layer, a superlattice adjacent the semiconductor layer and extending between the source and drain regions to define a channel, and a gate overlying the superlattice. The superlattice may include a plurality of stacked groups of layers, with each group of layers including a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and an energy band-modifying layer thereon. The energy band-modifying layer may include at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. The superlattice may contain Germanium.

L'invention concerne un dispositif à semi-conducteur pouvant comporter un substrat semi-conducteur sur isolant (SOI), une couche isolante jouxtant le substrat, et une couche à semi-conducteur jouxtant une face de la couche isolante à l'opposé du substrat. Le dispositif peut également comporter des zones source et de drain sur la couche à semi-conducteur, un super-réseau jouxtant la couche à semi-conducteur et s'étendant entre les zones source et de drain pour définir un canal, et une grille recouvrant le super-réseau. Ledit super-réseau peut comporter plusieurs groupes de couches empilés, chaque groupe de couches comportant empilées plusieurs monocouches à semi-conducteurs de base définissant une partie à semi-conducteur de base et, au-dessus de celle-ci, une couche modifiant la bande d'énergie. Ladite couche modifiant la bande d'énergie peut comporter au moins une monocouche non semi-conductrice confinée dans un réseau cristallin de parties à semi-conducteurs de base contiguës. Le super-réseau peut contenir du germanium.

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