Semiconductor device including a front side strained...

H - Electricity – 01 – L

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H01L 29/15 (2006.01) H01L 29/10 (2006.01)

Patent

CA 2623549

A semiconductor device may include a semiconductor substrate having front and back surfaces, a strained superlattice layer adjacent the front surface of the semiconductor substrate and comprising a plurality of stacked groups of layers, and a stress layer on the back surface of the substrate and comprising a material different than the semiconductor substrate. Each group of layers of the strained superlattice layer may include a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and at least one non- semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions.

Ce dispositif à semi-conducteur comprend un substrat à semi-conducteur présentant des surfaces avant et arrière, une couche à supermatrice contractée adjacente à la surface avant du substrat à semi-conducteur et comprenant une pluralité de groupes empilés de couches ainsi qu'une couche de contrainte sur la surface arrière du substrat comprenant une matière différente du substrat à semi-conducteur. Chaque groupe de couches de la couche à supermatrice contractée comporte une pluralité de monocouches à semi-conducteur de base empilées délimitant une partie de semi-conducteur de base et au moins une monocouche sans semi-conducteur logée dans une matrice cristalline des parties adjacentes à semi-conducteur de base.

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