Semiconductor device wiring including tunnelling layer

Details Semiconductor device wiring including tunnelling layer Semiconductor device wiring including tunnelling layer

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H01L 29/40 (2006.01) H01L 21/28 (2006.01) H01L 23/52 (2006.01) H01L 29/45 (2006.01) H01L 29/49 (2006.01)

Patent

CA 1228680

SEMICONDUCTOR DEVICE ABSTRACT OF THE DISCLOSURE A semiconductor device with an electrode wiring layer including an upper conductive layer and, inter- spaced with a barrier layer used for reaction prevention, a lower conductive layer contacting an active region. The barrier layer consists of an insulating film having a thickness thin enough for flow of a tunnel current.

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