Semiconductor device with deep substrate contacts

H - Electricity – 01 – L

Patent

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Details

H01L 23/48 (2006.01) H01L 23/52 (2006.01) H01L 23/538 (2006.01)

Patent

CA 2356868

The present invention relates to a semiconductor device (100) arranged at a surface (106) of a semiconductor substrate (102) having an initial doping (p+) having an electrical connection (101) comprising at least one plug (121) made of a material with a high conductivity, especially a material other than the substrate, especially a metal plug, between said initially doped substrate (102) and said surface of the substrate (106). The device has at least one ground connection (E) arranged to be connected to a ground pin (301) on a package (300). The ground connection (E) is arranged to be connected to said ground pin (301) using said electrical connection (101), where the initially doped substrate (102) is arranged to be connected to said ground pin (301) via a reverse side of the substrate (124), opposite said surface (106), and thereby being arranged to establish a connection between said ground connection (E) and said ground pin (301).

La présente invention concerne un dispositif semi-conducteur (100) posé sur une surface (106) d'un substrat semi-conducteur (102) initialement dopé (p+) et dont une connexion électrique (101) comprend au moins une prise (121) faite d'un matériau hautement électro-conducteur, plus particulièrement un matériau autre que le substrat, notamment une prise métallique, entre ledit substrat initialement dopé (102) et ladite surface du substrat (106). Le dispositif est équipé d'au moins une connexion à la masse (E) agencé pour une connexion à la broche de mise à la masse (301) d'un boîtier (300). En l'occurrence, la connexion de mise à la masse (E) est agencée pour être connectée à ladite broche de mise à la masse (301) par utilisation de ladite connexion électrique (101), le substrat initialement dopé (102) étant agencé pour être connecté à ladite broche de mise à la masse (301) via une face verso du substrat (124), à l'opposé de ladite surface (106), et donc étant agencée pour établir une connexion entre ladite connexion de mise à la masse (E) et ladite broche de mise à la masse (301).

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