Semiconductor device with superlattice

H - Electricity – 01 – L

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356/69, 331/71

H01L 29/15 (2006.01) H01L 33/00 (2006.01) H01L 47/02 (2006.01) H01S 5/32 (2006.01) H01S 5/34 (2006.01) H03B 9/12 (2006.01)

Patent

CA 913231

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