Semiconductor devices having superconducting interconnects

Details Semiconductor devices having superconducting interconnects Semiconductor devices having superconducting interconnects

H - Electricity

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H01L 23/538 (2006.01) H01L 21/768 (2006.01) H01L 23/498 (2006.01) H01L 23/532 (2006.01)

Patent

CA 1279935

Abstract A semiconductor device which includes either a single semiconductor chip bearing an integrated circuit (IC) or two or more electrically interconnected semiconductor chips, is disclosed. This device includes interconnects between device components (on the same chip and/or on different chips), at least one of which includes a region of superconducting material, e.g., a region of copper oxide superconductor having a Tc greater than about 77K. Significantly, to avoid undesirable interactions, at high processing temperatures, between the superconducting material and underlying, silicon-containing material (which, among other things, results in the superconducting material reverting to its non- superconducting state), the interconnect also includes a combination of material regions which prevents such interactions.

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