Semiconductor element module and method for manufacturing...

H - Electricity – 01 – L

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H01L 23/12 (2006.01) H01L 21/52 (2006.01) H01L 25/07 (2006.01) H01L 25/18 (2006.01)

Patent

CA 2715344

Provided are a semiconductor element module which is excellent in terms of thermal connection and electric connection, the cooling performance of which can be fully secured, and which is highly reliable, and a method for manufacturing the same. The semiconductor element module comprises an IGBT (2) and a diode (3) on both surfaces of which an electrode is formed, a ceramic substrate (7) on the surface of which wiring circuit layers (4, 5) which are bonded to one surface of the IGBT (2) and the diode (3) are formed and the thermal conductivity of which is high, a ceramic substrate (8) on the surface of which a wiring circuit layer (6) which is bonded to the other surfaces of the IGBT (2) and the diode (3) is formed and the thermal conductivity of which is high, and a sealing member (11) which is sandwiched between the outer edges of the ceramic substrates (7, 8) and with which the inside is sealed. These members are bonded by an ordinary temperature bonding method.

La présente invention a trait à un module d'élément semi-conducteur qui est excellent en termes de connexion thermique et de connexion électrique, dont la capacité de refroidissement peut être entièrement garantie, et qui est hautement fiable, et à son procédé de fabrication. Le module d'élément semi-conducteur comprend un transistor bipolaire à portée isolée (2) et une diode (3) sur les surfaces desquels est formée une électrode, un substrat céramique (7) sur la surface duquel sont formées des couches de circuit de câblage (4, 5) qui sont liées à une surface du transistor bipolaire à portée isolée (2) et de la diode (3) et dont la conductivité thermique est élevée, un substrat céramique (8) sur la surface duquel est formée une couche de circuit de câblage (6) qui est liée aux autres surfaces du transistor bipolaire à portée isolée (2) et de la diode (3) et dont la conductivité thermique est élevée, et un élément d'étanchéité (11) qui est pris en sandwich entre les bords extérieurs des substrats céramiques (7, 8) et avec lequel l'intérieur est scellé. Ces éléments sont liés au moyen d'un procédé de liaison à température ordinaire.

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