Semiconductor etching apparatus with magnetic array and...

Details Semiconductor etching apparatus with magnetic array and... Semiconductor etching apparatus with magnetic array and...

H - Electricity

01

J

356/192

H01J 37/32 (2006.01)

Patent

CA 1255815

-10- Abstract of the Disclosure Semiconductor Etching Apparatus With Magnetic Array And Vertical Shield In an apparatus for etching a large semiconductor wafer the etch rate and uniformity of etching at the edges is improved by using an array of magnets behind the collector plate to form a double ring of plasma and using a grounded shield ring with perforations to pass gases. The shield ring extends both above and below the surface of the wafer being etched.

518419

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