Semiconductor film bolometer thermal infrared detector

Details Semiconductor film bolometer thermal infrared detector Semiconductor film bolometer thermal infrared detector

G - Physics

01

J

G01J 5/20 (2006.01)

Patent

CA 2081306

A thermal infrared detector comprising a dielectric pellicle (5) suspended over a cavity in a substrate (6), the pellicle supporting a detector element (1) comprising a heat sensitive semiconductor layer (3) between a pair of thin film metallic contacts (2, 4), these being deposited on the pellicle, the cavity being formed by etching and removal of the substrate material through holes or slots (8) in the surface of the substrate.

Le détecteur thermique à infra-rouge décrit comprend une pellicule diélectrique (5) qui est maintenue au-dessus d'une cavité ménagée dans un susbtrat (6) et qui soutient un élément détecteur (1) comportant une couche semiconductrice thermosensible (3) entre une paire de contacts métalliques en forme de minces films (2, 4), déposés sur la pellicule. On forme la cavité en procédant par attaque et en évacuant le matériau du substrat par des trous ou des fentes (8) ménagés dans la surface du substrat.

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