Semiconductor gas sensor having thermally isolated site

Details Semiconductor gas sensor having thermally isolated site Semiconductor gas sensor having thermally isolated site

G - Physics

01

N

150/20

G01N 27/12 (2006.01)

Patent

CA 1286212

SEMICONDUCTOR GAS SENSOR HAVING THERMALLY ISOLATED SITE Abstract of the Disclosure A preferred semiconductor gas sensor of this invention features a gas interaction site comprising a gas sensitive semiconductor thin film and means for heating the film to an operative temperature. The thin film and heating means are carried upon a region of a substrate that is etched opposite the site to reduce the thickness of the region and thereby reduce heat flow from the region into a surrounding region.

524061

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