H - Electricity – 01 – L
Patent
H - Electricity
01
L
356/143, 117/183
H01L 23/29 (2006.01) H01L 23/556 (2006.01) H05K 3/28 (2006.01)
Patent
CA 2014821
ABSTRACT OF THE DISCLOSURE A semiconductor integrated circuit device having a protective film made of a polymer having a fluorine- containing aliphatic cyclic structure.
Katsushima Hiroshi
Kawasaki Toru
Nakamura Masaru
Nomura Shinzou
Unoki Masao
Asahi Glass
Marks & Clerk
Nippon Steel Semiconductor Corp.
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