Semiconductor integrated circuit device

H - Electricity – 01 – L

Patent

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356/143, 117/183

H01L 23/29 (2006.01) H01L 23/556 (2006.01) H05K 3/28 (2006.01)

Patent

CA 2014821

ABSTRACT OF THE DISCLOSURE A semiconductor integrated circuit device having a protective film made of a polymer having a fluorine- containing aliphatic cyclic structure.

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