G - Physics – 01 – C
Patent
G - Physics
01
C
G01C 19/72 (2006.01) G01K 7/01 (2006.01) H01L 27/02 (2006.01) H01L 27/15 (2006.01) H01S 3/131 (2006.01) H01S 5/024 (2006.01) H01S 5/068 (2006.01)
Patent
CA 2096519
2096519 9219014 PCTABS00017 A heater is fabricated in the same semiconductor substrate (10) with a light source (14) and a temperature sensor (12). A current is passed through the sensor and a voltage across it is sensed, the voltage indicative of actual substrate temperature. This temperature is compared to desired substrate temperature and any difference therebetween drives the heater to appropriately stabilize the substrate temperature at or near the desired temperature. Alternatively, an existing light source (14) fabricated on the substrate (10) has a current passed therethrough and a resulting voltage across the light source is sensed, the voltage and current being indicative of actual substrate temperature. The actual substrate temperature is compared to desired temperature and any difference therebetween drives the heating device (16) to appropriately stabilize the substrate temperature at or near the desired temperature. The circuitry for sensing the voltage across the sensor (12) along with circuitry for comparing the sensed and desired voltages and the heater driver (16) either may be fabricated on the substrate (10) or located external thereto.
Honeywell Inc.
Smart & Biggar
United Technologies Corporation
Winston Charles R. Jr.
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