Semiconductor mechanical-electrical transducer and method of...

Details Semiconductor mechanical-electrical transducer and method of... Semiconductor mechanical-electrical transducer and method of...

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H01L 29/96 (2006.01) H01L 21/00 (2006.01) H01L 23/29 (2006.01) H01L 29/00 (2006.01) H01L 29/06 (2006.01) H01L 29/267 (2006.01) H01L 29/84 (2006.01)

Patent

CA 959975

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