Semiconductor memory device having stacked-capacitor type...

Details Semiconductor memory device having stacked-capacitor type... Semiconductor memory device having stacked-capacitor type...

H - Electricity

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352/82.4

H01L 27/10 (2006.01) H01L 21/8242 (2006.01) H01L 27/108 (2006.01)

Patent

CA 1270328

ABSTRACT OF THE DISCLOSURE A semiconductor memory device including a plurality of stacked-capacitor type memory cells, each having a capacitor storing data and a transfer-gate transistor transferring data to the capacitor. The transistor includes a gate connected to a word line and formed by an insulating layer, and source and drain regions. Each of the memory cells has a first insulating layer covering the gate of the transfer-gate transistor. The capacitor in each memory cell includes a second insulating layer covering another word line adjacent to the one word line and having a larger thickness perpendicular to a plane of a substrate than that of the first insulating layer covering the gate, a second conductive layer which is in contact with one of the source and drain regions of the transistor, extends over the gate through the first insulating layer and covers the second insulating layer, a third insulating layer formed on the second conductive layer, and a third conductive layer extending over the third insulating later.

501050

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