Semiconductor pressure transducer

Details Semiconductor pressure transducer Semiconductor pressure transducer

G - Physics

01

L

73/3

G01L 7/08 (2006.01) G01L 9/00 (2006.01) G01L 13/02 (2006.01) H01L 29/84 (2006.01)

Patent

CA 1193464

ABSTRACT OF THE DISCLOSURE A semiconductor pressure transducer including a measuring diaphragm of semiconductor material for sensing pressure supported by a support member of the same material. An oxide layer and a thin glass layer are interposed between the measuring diaphragm. and the support member.

415846

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