G - Physics – 01 – L
Patent
G - Physics
01
L
73/70
G01L 1/18 (2006.01)
Patent
CA 1189727
ABSTRACT OF THE DISCLOSURE A transducer for sensing pressure, wherein the transducer is formed of a single crystal semiconductor square chip having piezoresistive stress sensors disposed on one surface thereof and a cavity formed in the opposite surface, and wherein one of the edges of the chip is oriented at an angle of substantially 22.5° with respect to a <110> crystal direction of the chip.
416283
Honeywell Inc.
Smart & Biggar
LandOfFree
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