Semiconductor stress sensing apparatus

Details Semiconductor stress sensing apparatus Semiconductor stress sensing apparatus

G - Physics

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73/3, 349/63

G01K 7/16 (2006.01) G01L 1/18 (2006.01) G01L 1/22 (2006.01) G01L 9/00 (2006.01) G01L 9/06 (2006.01)

Patent

CA 1176744

ABSTRACT An integrated circuit stress transducer system including signal processing circuitry responsive to signals from semiconductor stress sensors where the processing circuitry output signals are compensated for sensor stress sensitivity variations.

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