Semiconductor structure using platinel silicide as a...

Details Semiconductor structure using platinel silicide as a... Semiconductor structure using platinel silicide as a...

H - Electricity

01

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356/156, 356/58,

H01L 27/07 (2006.01) C23C 14/58 (2006.01) H01L 21/00 (2006.01) H01L 21/288 (2006.01) H01L 21/8222 (2006.01)

Patent

CA 965189

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