Semiconductor structures and a method of manufacturing...

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148/1, 345/32, 1

H01S 5/227 (2006.01) H01L 21/306 (2006.01) H01S 5/22 (2006.01) H01S 5/323 (2006.01) H01L 33/00 (2006.01)

Patent

CA 1332341

- 27 - ABSTRACT SEMICONDUCTOR STRUCTURES AND A METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURES In a semiconductor buried heterostructure laser, having a mesa 2, 3, 4 and confinement layers 5, 6, 7 on a substrate 12, at least the lowermost of the confinement layers 5, 6, 7 is substantially planar up to the mesa. This is achieved by MOVPE growth of InP against lateral surfaces of the mesa 2, 3, 4 which are defined by distinct crystallographic planes of the material of the mesa. In particular (111) B InP planes are used. The laser is particularly for use in the field of optical communications.

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