Semiconductor type gas flow sensor

Details Semiconductor type gas flow sensor Semiconductor type gas flow sensor

G - Physics

01

F

G01F 1/68 (2006.01) G01F 1/684 (2006.01) G01P 5/10 (2006.01) G01P 9/00 (2006.01)

Patent

CA 2070228

ABSTRACT OF THE DISCLOSURE Disclosed is a semiconductor type gas flow sensor for sensing a change of gas flow by means of thermo-sensitive resistor elements, comprising two semiconductor substrates, at least one having an etched therein groove for forming gas path and both being placed on each other and joined together to form a gas path therein, characterized in that said semiconductor substrates being at their joinable surfaces covered with soldering films of dissimilar metals able to be alloyed by heating and they are placed on each other and heated in pressed state to form therebetween an alloyed metal joint without causing any reverse affection of soldering temperature to the thermosensitive resistor elements placed in the gas path.

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