Semiconductor variable capacitance pressure transducer

Details Semiconductor variable capacitance pressure transducer Semiconductor variable capacitance pressure transducer

H - Electricity

01

L

334/1, 340/141,

H01L 29/00 (2006.01) G01L 9/00 (2006.01) H01G 5/01 (2006.01)

Patent

CA 1154502

ABSTRACT OF THE DISCLOSURE A variable capacitance pressure transducer useful in sensing pressures or pressure differentials, especially for motors vehicle applications, includes conductor plates which are constructed, one of a lamina?e of a conductive material and an insulating material and the other of a doped semiconductor material. The semiconductor material has an etched recess positioned in alignment th, and spaced from, the conductive material on the insulating material, such insulating material being bonded to the semiconductor material along a boundary that surrounds the conductive material. A passage is drilled into the resulting enclosed volume through the insulating material and the passage is used to establish a predetermined pressure in the enclosed volume and to establish electrical contact with the conductive material.

356438

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