Sensitizing bath for chalcogenide resists

Details Sensitizing bath for chalcogenide resists Sensitizing bath for chalcogenide resists

H - Electricity

01

L

117/23

H01L 21/31 (2006.01) G03F 7/004 (2006.01)

Patent

CA 1218567

- 20 - SENSITIZING BATH FOR CHALCOGENIDE RESISTS Abstract The invention pertains to lithographic processes for producing devices, such as semiconductor devices and involves a new sensitizing bath for chalcogenide glass- based resists. The inventive bath is alkaline and contains a silver complex whose ligand includes hydrophobic and hydrophilic moieties. Upon immersing a chalcogenide glass in the bath, a silver composition-containing film is formed on the surface of the glass. This film is substantially free of pin holes and has a uniform thickness which is insensitive to immersion time and largely determined by the pH of the bath.

452062

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