Sensor apparatus and method therefor

Details Sensor apparatus and method therefor Sensor apparatus and method therefor

G - Physics

01

N

G01N 27/414 (2006.01)

Patent

CA 2724505

A sensor apparatus includes a metal oxide semiconductor ("MOS") sensor with a gas-sensing surface normally having a first sensitivity to a first species of flammable gas and a second sensitivity to a second, different species of flammable gas. A selective sensitivity-enhancement layer is disposed on the gas-sensing surface such that the first sensitivity becomes increased and the second sensitivity remains substantially unchanged.

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