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G - Physics

01

N

G01N 29/02 (2006.01) G01N 9/00 (2006.01) G01N 29/036 (2006.01)

Patent

CA 2098925

2098925 9211532 PCTABS00014 A density sensor comprises a cavity arranged to receive the gas whose density is to be sensed. The cavity is divided into two chambers by a flexibly mounted diaphragm. A piezoelectric excitation device at one end of the cavity is used to excite the gas in the cavity into resonant vibration in a mode having an anti-node at the diaphragm, which causes the diaphragm to vibrate with the gas. Another piezoelectric device senses the vibration, whose frequency is a function of the known mass of the diaphragm and the density of and speed of sound in the gas. This last parameter can be sensed by exciting the gas in the cavity into resonant vibration in a second mode having a node at the diaphragm, so that the diaphragm does not take part in the vibration. Alternatively, it can be sensed by providing a second cavity, also arranged to receive the gas but not having a diaphragm, and resonantly vibrating the gas in the second cavity.

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