Shadow sculpted thin films

Details Shadow sculpted thin films Shadow sculpted thin films

G - Physics

02

B

G02B 1/10 (2006.01) B01D 61/14 (2006.01) B81B 1/00 (2006.01) C23C 14/22 (2006.01) C23C 16/04 (2006.01) C23C 16/44 (2006.01) C23C 16/458 (2006.01) G02B 1/11 (2006.01) G02B 5/20 (2006.01) G02B 5/30 (2006.01) G02B 6/12 (2006.01) G02B 6/132 (2006.01) H01L 21/203 (2006.01) H01L 23/66 (2006.01)

Patent

CA 2182452

A method of making vapor deposited thin films by rotating a substrate in the presence of an obliquely incident vapor flux. The substrate may be rotated about an axis normal to the surface of the substrate and/or parallel to the surface of the substrate by two motors mounted with their axes orthogonal to each other. Angle of incidence, measured from the normal to the surface of the substrate, exceeds 80°. Feedback from a deposition rate monitor allows control of rotation speed of both motors to produce a growth with a defined pattern.

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