Shear motor for dynamic mount for laser-beam steering mirror

H - Electricity – 01 – L

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H01L 41/04 (2006.01)

Patent

CA 1294659

Abstract of the Invention A dynamic mount and actuator for a laser mirror 20 comprising three piezoelectric motors 40 mounted 120° apart on a motor-mount member 32. Each motor 40 comprises a rectangular block 44 composed of horizontal layers of electroded piezoelectric wafers 46 adjacent layers being bonded together. The one-axis movements of each shear motor 40 are amplified by and transmitted to an axially extending flex-joint assembly 36 which is formed with two universal-type flex joints 102, 104 therein. The back of the laser mirror 20 has three backing plates 22 affixed thereto at locations corresponding with the locations of the flex-joint assemblies 36 and the motor-mount member 32 has three suspension ring assemblies 27 affixed thereto, one at each backing plate location. Each suspension ring assembly 27 comprises a suspension ring holder 29 affixed to the motor-mount member 32 and a suspension ring 26 within the holder 29, movably attached to the holder 29. A space exists between the back of the suspension ring 26 and the front of its holder 29 and contains a flexure assembly 28 comprising three slotted, flexible, ring-shaped washers 124 separated by two spaced, concentric annular spacers 126. The flexure assembly 28 permits axial, tip and tilt movements of its associated mirror-backing plate 22. A support member 34 coupled to the flex-joint assembly 36 extends from the front end thereof through the suspension ring holder 29, flexure assembly 28, suspension ring 26 and mirror-backing plate 24 and is fastened to the mirror 20 by an interface pin 30 which does not distort the mirror 20.

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