Shielding for arc suppression in rotating magnetron...

Details Shielding for arc suppression in rotating magnetron... Shielding for arc suppression in rotating magnetron...

C - Chemistry, Metallurgy

23

C

C23C 14/35 (2006.01) C23C 14/34 (2006.01) H01J 37/34 (2006.01)

Patent

CA 2089149

A cathode body (12) for a rotating cylindrical magnetron (10) wherein the magnetron provides a sputtering zone extending along the length of the cathode body (12) and circumferentially along a relatively narrow region thereof. The cathode body (12) includes an elongated tubular member (14) having a target material (16) at the outer surface thereof. A collar (32) of electrically- conductive material is located at at least one end of the tubular member (14), and extends along the tubular member (14) from that one end into the erosion zone. A sleeve of electrically-conductive material may extend circumferentially around the collar (32).

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