H - Electricity – 01 – L
Patent
H - Electricity
01
L
356/149
H01L 29/78 (2006.01) H01L 21/00 (2006.01) H01L 21/033 (2006.01) H01L 21/336 (2006.01) H01L 21/84 (2006.01) H01L 29/786 (2006.01)
Patent
CA 1233571
ABSTRACT OF THE DISCLOSURE Disclosed is a thin film field effect transistor where the horizontal channel length is less then about 10 microns. Also, disclosed is a method of lithographically forming a channel having a channel length less then the resolution of the lithographic means.
465170
Vesey David J.
Yang Mohshi
Energy Conversion Devices Inc.
Macrae & Co.
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