Si-n containing coatings for electronic devices

Details Si-n containing coatings for electronic devices Si-n containing coatings for electronic devices

H - Electricity

01

B

117/162, 117/103

H01B 3/12 (2006.01) H01L 21/318 (2006.01)

Patent

CA 1284749

SiN-CONTAINING COATINGS FOR ELECTRONIC DEVICES ABSTRACT A method of forming at low temperatures silicon- and nitrogen-containing ceramic or ceramic-like coatings for the protection of electronic devices. The coatings are produced by the ceramification at temperatures of, or below, 400 degrees Centigrade of preceramic silicon nitrogen- containing polymer coatings deposited from a solvent solution. The coatings are useful for planarizing the surfaces of electronic devices and for passivation.

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