Si.sub.3n.sub.4 formed by nitridation of sintered silicon...

C - Chemistry – Metallurgy – 04 – B

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C04B 35/52 (2006.01) C04B 35/14 (2006.01) C04B 35/591 (2006.01)

Patent

CA 1093589

ABSTRACT OF THE DISCLOSURE A polycrystalline silicon nitride body is produced by shaping silicon powder into a green body, sintering the body to produce a sintered body with a density ranging from 60% to 75% of the theoretical density of silicon, said sintered body having a microstructure with an average grain size as well as an average poresize ranging from about 0.1 micron to 6 microns and wherein the pores are interconnecting and open to the surface of the body, and reacting said sintered body with gaseous nitrogen to convert it to silicon nitride.

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