Si3n4 process using polysilane or polysilazane as a binder

Details Si3n4 process using polysilane or polysilazane as a binder Si3n4 process using polysilane or polysilazane as a binder

C - Chemistry, Metallurgy

04

B

25/123

C04B 35/58 (2006.01) C04B 35/589 (2006.01) C04B 35/593 (2006.01)

Patent

CA 1320815

35-3-127 CN Si3N4 PROCESS USING POLYSILANE OR POLYSILAZANES AS A BINDER Abstract A process for making a densified silicon nitride article utilizing polysilanes or polysilazanes as a binder is described. The process involves blending of a silicon nitride composition with a polysilane or a polysilazane to form a mixture. The mixture is molded into an article. The article is then pyrolyzed in a non-oxidizing atmosphere and at a temperature sufficient to form a pyrolyzed article comprising amorphous silicon nitride and silicon carbide. The article is then sin- tered at a temperature equal to or greater than 1400°C to form a densified silicon nitride article.

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