Silicide thermal heaters for silicon-on-insulator...

Details Silicide thermal heaters for silicon-on-insulator... Silicide thermal heaters for silicon-on-insulator...

G - Physics

02

F

G02F 1/19 (2006.01) G02B 6/12 (2006.01)

Patent

CA 2694526

A thermally switched Silicon-On-Insulator (SOT) photo electronic device includes a silicon layer including an optical waveguide and a suicide heating element horizontally adjacent to the waveguide. The waveguide has a refractive index that changes with heat applied to the waveguide.

L'invention porte sur un dispositif photoélectronique de Silicium Sur Isolant (SOI) thermiquement commuté, qui comprend une couche de silicium comprenant un guide d'ondes optiques et un élément de chauffage en siliciure horizontalement adjacent au guide d'ondes. Le guide d'ondes a un indice de réfraction qui change selon la chaleur appliquée au guide d'ondes.

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