Silicon avalanche photodiode array

H - Electricity – 01 – L

Patent

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Details

H01L 31/107 (2006.01) H01J 31/26 (2006.01) H01J 31/50 (2006.01) H01L 21/261 (2006.01) H01L 27/144 (2006.01) H01L 27/146 (2006.01) H01L 31/02 (2006.01) H01L 31/028 (2006.01) H01L 31/0288 (2006.01) H01L 31/0352 (2006.01)

Patent

CA 2095849

2095849 9209109 PCTABS00013 A wafer of neutron transmutation doped silicon having a pn junction between extended opposite surfaces is formed with bevelled edges. A plurality of reverse biased signal contacts is disposed on one surface to provide an integrated array of photodiodes.

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