Silicon carbide coated graphite members and process for...

Details Silicon carbide coated graphite members and process for... Silicon carbide coated graphite members and process for...

H - Electricity

01

J

313/5, 117/86

H01J 35/10 (2006.01) C04B 35/52 (2006.01) C04B 41/50 (2006.01) C04B 41/87 (2006.01) C23C 16/32 (2006.01)

Patent

CA 1013213

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