Silicon-containing coatings and a method for their preparation

Details Silicon-containing coatings and a method for their preparation Silicon-containing coatings and a method for their preparation

C - Chemistry, Metallurgy

23

C

117/85

C23C 16/24 (2006.01) C23C 16/32 (2006.01) C23C 16/42 (2006.01) H01L 21/285 (2006.01)

Patent

CA 1303915

SILICON-CONTAINING COATINGS AND A METHOD FOR THEIR PREPARATION ABSTRACT The invention relates to the formation of silicon- containing coatings from the vapor phase thermal decomposition of halosilanes, polyhalodisilanes, polyhalo- silanes or mixtures thereof in the presence of a metal catalyst. The instant invention also relates to the formation of silicon- and carbon-containing coatings and silicon- and titanium-containing coatings from the vapor phase thermal decomposition of alkyl halides and titanium halides, respectively, in the presence of a halosilane, polyhalosilane or halodisilane, and a metal catalyst.

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