Silicon melting and evaporation method and apparatus for...

Details Silicon melting and evaporation method and apparatus for... Silicon melting and evaporation method and apparatus for...

C - Chemistry, Metallurgy

01

B

23/325, 23/389,

C01B 33/02 (2006.01) B01J 19/00 (2006.01) C23C 14/14 (2006.01) C30B 13/22 (2006.01) C30B 15/10 (2006.01) C30B 15/14 (2006.01) C30B 23/02 (2006.01) C30B 23/06 (2006.01) C30B 30/00 (2006.01) H05B 7/20 (2006.01)

Patent

CA 1240482

ABSTRACT OF THE DISCLOSURE A high-purity method of forming a silicon melt utilizes a solid silicon body which is drilled to provide bores into which electrodes are inserted. The electrodes preferably are also of silicon and an electric arc-current is passed through the electrodes to generate an arc which melts out the body to define a cavity therein containing the melt. The melt may be used for the drawing of a silicon bar or for the deposition of silicon in vapor form from the melt upon a substrate in a vacuum chamber.

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